reducing electron-beam projection equipment

reducing electron-beam projection equipment
mažinamasis elektronpluoštis projekcinės litografijos įrenginys statusas T sritis radioelektronika atitikmenys: angl. reducing electron-beam projection equipment vok. Elektronenstrahlprojektionsanlage mit Bildverkleinerung, f rus. установка электронно-лучевой проекционной литографии с уменьшением изображения, f pranc. équipement de lithographie électronique de projection avec réduction d'image, m

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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